Indonesian
Customer Background
The enterprise specializes in the production of photoresists and electronic specialty gases for semiconductors. The ozone oxidation purification process in its factory requires a stable supply of high-purity oxygen (≥99.2%), and the equipment must comply with South Korea's industrial gas safety standards and the dust-free production requirements of the semiconductor industry.
Core Pain Points
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The original liquid oxygen supply mode has transportation loss (about 5%), and is greatly affected by the fluctuation of international liquid oxygen prices, resulting in insufficient supply stability;
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The production of semiconductor materials has extremely high requirements for oxygen cleanliness, which needs to control the particle content ≤ 0.1μm and eliminate oil pollution;
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The factory has limited space, requiring compact equipment design, while meeting South Korea's strict environmental emission requirements.
Solution
GNEE provided one set of 800Nm³/h high-purity VPSA oxygen system, adopting a customized solution of "oil-free process + multi-stage purification":
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Imported oil-free air compressors are selected, combined with three-stage filters (precision filtration + activated carbon adsorption + high-efficiency oil removal), ensuring that the particle content of oxygen is less than 0.05μm and the oil content is ≤ 0.001mg/m³;
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High-efficiency lithium-based molecular sieves and double-tower adsorption structure are adopted, and by optimizing the adsorption-desorption cycle, the oxygen purity is stably maintained at 99.3%-99.5%;
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The equipment adopts a modular integrated design, and its floor space is 40% smaller than that of traditional equipment, meeting the factory's space requirements.
Application Effects
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Stable Supply: The on-site oxygen production mode of "on-demand production and immediate use" is realized, completely replacing liquid oxygen supply. The annual transportation loss cost is reduced by more than 300,000 US dollars, and the oxygen purity fluctuation is ≤ 0.1%;
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Process Improvement: High-purity oxygen increases the photoresist purification efficiency by 15%, and the product yield rises from 96.2% to 98.5%, obtaining the supply chain certification of Samsung Electronics;
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Compliance and Energy Saving: The equipment has passed relevant certifications, with waste gas emissions lower than South Korea's environmental protection standards. The unit oxygen power consumption is 0.35kW·h/m³, which is 8% lower than that of local equipment in South Korea.
In addition to VPSA Oxygen Generators, we also produce PSA Oxygen Generators, storage tanks, heat exchangers and other products. If you are interested in VPSA Oxygen Systems or other products, please feel free to send an email to info@gneeheatex.com. We will be very happy to serve you.
